De Pauw, HerbertHerbertDe PauwDe Smet, HerbertHerbertDe SmetVanfleteren, JanJanVanfleterenLernout, JoJoLernoutVan Calster, AndreAndreVan Calster2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2503Multilayer motherboard technology in MCM-Si with opto-electronic featuresProceedings paper