Nakamura, Y.Y.NakamuraWatanabe, M.M.WatanabeKondoh, E.E.KondohBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25688Metal thin films etching in supercritical CO2 fluidMeeting abstract