Verleysen, EvelineEvelineVerleysenRichard, OlivierOlivierRichardBender, HugoHugoBenderSchryvers, DominiqueDominiqueSchryversVandervorst, WilfriedWilfriedVandervorst2021-10-172021-10-172008-09https://imec-publications.be/handle/20.500.12860/14751Chemical analysis of nickel silicides with high spatial resolution by combined EDS and EELS (ELNES)Proceedings paper