Simplified rear-side patterning for silicon heterojunction IBC solar cells: development of the in situ "nano-envelope" dry clean

Sivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanUddin, MD GiusMD GiusUddinXu, MengleiMengleiXuAbdulraheen, YaserYaserAbdulraheenGordon, IvanIvanGordonSzlufcik, JozefJozefSzlufcikPoortmans, JefJefPoortmans2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/31803Simplified rear-side patterning for silicon heterojunction IBC solar cells: development of the in situ "nano-envelope" dry cleanProceedings paperhttps://ieeexplore.ieee.org/document/8548143