Synthesizing a secondary ionization model for matrix elements sputtered from SiOx: findings and trends

Serrano, JavierJavierSerranoDe Witte, HildeHildeDe WitteGuzman, B.B.GuzmanBlanco, J. M.J. M.BlancoVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4738Synthesizing a secondary ionization model for matrix elements sputtered from SiOx: findings and trendsProceedings paper