Vereecken, PhilippePhilippeVereeckenRuythooren, WouterWouterRuythooren2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18267Mechanistic insights of copper damascene plating in small and large featuresMeeting abstracthttp://ecsmeet3.peerx-press.org/jsp/mas/reportTechProg.jsp?MEETING_ID=101&SYM_ID=143#abs1994