Demuynck, StevenStevenDemuynckKim, HongunHongunKimHuffman, CraigCraigHuffmanDarnon, MaximeMaximeDarnonStruyf, HerbertHerbertStruyfVersluijs, JankoJankoVersluijsClaes, MartineMartineClaesVereecke, GuyGuyVereeckeVolders, HennyHennyVoldersHeylen, NancyNancyHeylenKellens, KristofKristofKellensBeyer, GeraldGeraldBeyer2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13654Dielectric reliability of 50nm 1/2 pitch structures in Aurora® LKProceedings paper