Zhou, YundongYundongZhouFranquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoMerkulov, AlexAlexMerkulovKeenan, Michael R.Michael R.Keenanvan der Heide, PaulPaulvan der HeideTrindade, Gustavo F.Gustavo F.TrindadeVandervorst, WilfriedWilfriedVandervorstGilmore, Ian S.Ian S.Gilmore2025-01-232024-09-172025-01-2320240734-2101WOS:001305859200001https://imec-publications.be/handle/20.500.12860/44511OrbiSIMS depth profiling of semiconductor materials-Useful yield and depth resolutionJournal article10.1116/6.0003821WOS:001305859200001SIMSENERGYIONSMASS