Breuil, LaurentLaurentBreuilVan den Bosch, GeertGeertVan den BoschCacciato, AntonioAntonioCacciatoDate, LucienLucienDateKar, Gouri SankarGouri SankarKarTang, BaojunBaojunTangArreghini, AntonioAntonioArreghiniDebusschere, IngridIngridDebusschereVan Houdt, JanJanVan Houdt2021-10-192021-10-1920110167-9317https://imec-publications.be/handle/20.500.12860/18624Optimization of gate stack parameters towards 3D-SONOS applicationJournal article