The effect of the substrate characteristics on the electrochemical nucleation and growth of copper

Nagar, MagiMagiNagarRadisic, AlexAlexRadisicStrubbe, KatrienKatrienStrubbeVereecken, PhilippePhilippeVereecken2021-10-232021-10-2320160013-4651https://imec-publications.be/handle/20.500.12860/27067The effect of the substrate characteristics on the electrochemical nucleation and growth of copperJournal article10.1149/2.0081612jeshttp://jes.ecsdl.org/cgi/content/abstract/163/12/D3053