Ragnarsson, Lars-AkeLars-AkeRagnarssonDekkers, HaroldHaroldDekkersSchram, TomTomSchramChew, Soon AikSoon AikChewParvais, BertrandBertrandParvaisDehan, MorinMorinDehanDevriendt, KatiaKatiaDevriendtTao, ZhengZhengTaoSebaai, FaridFaridSebaaiBaerts, ChristinaChristinaBaertsVan Elshocht, SvenSvenVan ElshochtYoshida, NaomiNaomiYoshidaPhatak, AnupAnupPhatakLazik, ChristophChristophLazikBrand, AdamAdamBrandClark, WilliamWilliamClarkFried, DavidDavidFriedMocuta, DanDanMocutaBarla, KathyKathyBarlaHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronThean2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25793RMG nMOS 1st process enabling 10x lower gate resistivity in N7 bulk FinFETsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7223656