Liu, I-YunI-YunLiuVan Winckel, LaurentLaurentVan WinckelBoakes, LizzieLizzieBoakesGarcia Bardon, MarieMarieGarcia BardonRolin, CedricCedricRolinRagnarsson, Lars-AkeLars-AkeRagnarsson2025-06-042024-12-032025-06-0420240894-6507WOS:001363164100015https://imec-publications.be/handle/20.500.12860/44909Modeling the Energy Consumption of Integrated Circuit Fab InfrastructureJournal article10.1109/TSM.2024.3408926WOS:001363164100015