Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteries

Dobbelaere, ThomasThomasDobbelaereMattelaer, FelixFelixMattelaerDendooven, JolienJolienDendoovenVereecken, PhilippePhilippeVereeckenDetavernier, ChristopheChristopheDetavernier2021-10-232021-10-2320160897-4756https://imec-publications.be/handle/20.500.12860/26565Plasma-enhanced atomic layer deposition of iron phosphate as a positive electrode for 3D lithium-ion microbatteriesJournal articlehttp://pubs.acs.org/doi/abs/10.1021/acs.chemmater.6b00853