De Gryse, O.O.De GryseClauws, P.P.ClauwsLebedev, O.O.LebedevVan Landuyt, J.J.Van LanduytVanhellemont, JanJanVanhellemontClaeys, C.C.ClaeysSimoen, EddyEddySimoen2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5191Chemical and structural characterization of oxygen precipitates in silicon by infrared spectroscopy and TEMJournal article