Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet

Saadeh, QaisQaisSaadehPhilipsen, VickyVickyPhilipsenThakare, DeveshDeveshThakareNaujok, PhilippPhilippNaujokWu, MeiyiMeiyiWuScholze, FrankFrankScholzeBuchholz, ChristianChristianBuchholzTagbo-fotso, ClaudiaClaudiaTagbo-fotsoBabalik, AyhanAyhanBabalikKupper, BettinaBettinaKupperSoltwisch, VictorVictorSoltwisch2023-07-072023-02-052023-02-062023-07-0720232159-3930WOS:000906989700007https://imec-publications.be/handle/20.500.12860/41061Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultravioletJournal article10.1364/OME.474887WOS:000906989700007SOFT-X-RAYK ABSORPTION EDGESPHOTOABSORPTIONREFLECTIVITYEUV masksEUV wavelength rangetantalumcobaltoptical material properties