Physical Loss Mechanisms for resonant acoustical waves in Boron doped poly-SiGe deposited with Hydrogen dilution

Stoffels, SteveSteveStoffelsAutizi, EnricoEnricoAutiziVan Hoof, RitaRitaVan HoofSeveri, SimoneSimoneSeveriPuers, BobBobPuersWitvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmans2021-10-182021-10-182010-110021-8979https://imec-publications.be/handle/20.500.12860/18044Physical Loss Mechanisms for resonant acoustical waves in Boron doped poly-SiGe deposited with Hydrogen dilutionJournal article