Singanamalla, RaghunathRaghunathSinganamallaYu, HongYuHongYuYuVan Daele, BennyBennyVan DaeleKubicek, StefanStefanKubicekDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12917Effective work-function modulation by aluminum-ion implantation for metal-gate technology (poly-Si/TiN/SiO2)Journal article