The integration of low k hydrogen silsesquioxanes (HSQ) in sub 0.35µm processes

Meynan, H.H.MeynanUttech, R.R.UttechGao, TengTengGaoVan Hove, MarleenMarleenVan HoveMaex, KarenKarenMaex2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2764The integration of low k hydrogen silsesquioxanes (HSQ) in sub 0.35µm processesOral presentation