Wafer reconstruction: An alternative 3D integration process flow

Wang, TengTengWangSilva, J.L.J.L.SilvaDaily, RobertRobertDailyCapuz, GiovanniGiovanniCapuzGonzalez, MarioMarioGonzalezRebibis, Kenneth JuneKenneth JuneRebibisKroehnert, S.S.KroehnertBeyne, EricEricBeyne2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23378Wafer reconstruction: An alternative 3D integration process flowProceedings paperhttps://ieeexplore.ieee.org/document/6745754