Thakare, DeveshDeveshThakareWu, MeiyiMeiyiWuOpsomer, KarlKarlOpsomerDetavernier, ChristopheChristopheDetavernierNaujok, PhilippPhilippNaujokSaadeh, QaisQaisSaadehSoltwisch, VictorVictorSoltwischDelabie, AnneliesAnneliesDelabiePhilipsen, VickyVickyPhilipsen2023-02-232022-09-192023-02-232022978-1-5106-4977-40277-786XWOS:000850450900011https://imec-publications.be/handle/20.500.12860/40463Evaluation of Ta-Co alloys as novel high-k EUV mask absorberProceedings paper10.1117/12.2614235978-1-5106-4978-1WOS:000850450900011