Image imbalance compensation in alternating phase-shift masks towards the 45 node through-pitch imaging

Van Look, LieveLieveVan LookKasprowicz, BryanBryanKasprowiczZibold, AxelAxelZiboldDegel, WolfgangWolfgangDegelVandenberghe, GeertGeertVandenberghe2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11411Image imbalance compensation in alternating phase-shift masks towards the 45 node through-pitch imagingProceedings paper