Shift and ratio method revisited: extraction of the fin width in multi-gate devices

Collaert, NadineNadineCollaertDixit, AbhisekAbhisekDixitKottantharayil, AnilAnilKottantharayilRooyackers, RitaRitaRooyackersVeloso, AnabelaAnabelaVelosoDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10247Shift and ratio method revisited: extraction of the fin width in multi-gate devicesJournal article