Pham, NgaNgaPhamSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanJamieson, GeraldineGeraldineJamiesonTutunjyan, NinaNinaTutunjyanPeng, LanLanPengVolkaerts, DannyDannyVolkaerts2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/257573D integration technology using W2W direct bonding and TSVProceedings paper