Vereecken, PhilippePhilippeVereeckenHuyghebaert, CedricCedricHuyghebaert2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23335Conformal deposition For 3D thin-film batteriesProceedings paperhttp://ecst.ecsdl.org/content/58/10/111.abstract