van Neer, P. L. M. J.P. L. M. J.van Neervan Willigen, D. M.D. M.van WilligenHorchens, L.L.HorchensGerritsma, A. M.A. M.GerritsmaBogdanowicz, JanuszJanuszBogdanowiczChen, CongCongChenQuesson, B. A. J.B. A. J.Quesson2025-07-282025-07-282025978-1-5106-8638-00277-786XWOS:001514426300048https://imec-publications.be/handle/20.500.12860/45955Suitability of Half-Wavelength Contact Acoustic Microscopy to detect deeply buried voidsProceedings paper10.1117/12.3050820978-1-5106-8639-7WOS:001514426300048