Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiation

Choudhury, FarazFarazChoudhuryde Marneffe, Jean-FrancoisJean-Francoisde MarneffeBaklanov, MikhaïlMikhaïlBaklanovNishi, Y.Y.NishiShohet, J.LJ.LShohet2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/23653Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum ultraviolet radiationMeeting abstract