Goethals, MiekeMiekeGoethalsPollers, IngridIngridPollersVan Roey, FriedaFriedaVan RoeySugihara, TakashiTakashiSugiharaRonse, KurtKurtRonseVan Driessche, VeerleVeerleVan DriesscheTzviatkov, PlamenPlamenTzviatkovMedina, A.A.MedinaGabor, A.A.GaborBlakeney, A.A.BlakeneySteinhausler, T.T.SteinhauslerBiafore, J.J.BiaforeSlater, S.S.SlaterNalamasu, O.O.NalamasuHoulihan, F.F.HoulihanKometani, J.J.KometaniTimko, A.A.TimkoCirelli, R.R.Cirelli2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2588Lithographic performance of 193 nm single and bi-layer materialsJournal article