Bender, HugoHugoBenderRoussel, PhilippePhilippeRousselKolodinski, SabineSabineKolodinskiTorres Jacome, AlfonsoAlfonsoTorres JacomeAlves Donaton, RicardoRicardoAlves DonatonMaex, KarenKarenMaexvan der Sluis, P.P.van der Sluis2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1077Characterization of ultra-thin PtSi films for infrared detectorsProceedings paper