Cryogenic approaches to low-damage patterning of porous low-k films

Iacopi, FrancescaFrancescaIacopiStauss, SvenSvenStaussTerashima, KazuoKazuoTerashimaBaklanov, MikhaïlMikhaïlBaklanov2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20841Cryogenic approaches to low-damage patterning of porous low-k filmsMeeting abstract