Characterisation of mechanical stresses of device isolation structures by micro-Raman spectroscopy and modelling

Jones, S. K.S. K.JonesAhmed, M.M.AhmedBazley, D. J.D. J.BazleyBeanland, R. J.R. J.BeanlandDe Wolf, IngridIngridDe WolfHill, C.C.HillRothwell, W. J.W. J.Rothwell2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3544Characterisation of mechanical stresses of device isolation structures by micro-Raman spectroscopy and modellingProceedings paper