CMOS compatible anodization process for low cost high density capacitors

Detalle, MikaelMikaelDetalleRakowski, MichalMichalRakowskiPotoms, GoedeleGoedelePotomsMercha, AbdelkarimAbdelkarimMerchade Potter de ten Broeck, MurielMurielde Potter de ten BroeckPhommahaxay, AlainAlainPhommahaxaySabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanSoussan, PhilippePhilippeSoussan2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17014CMOS compatible anodization process for low cost high density capacitorsMeeting abstracthttp://ecsmeet3.peerx-press.org/ms_files/ecsmeet3/2010/05/10/00003300/00/3300_0_art_0_l27mhd.pdf