Development of a-Si/c-Si heterojunctions for the i2-module concept: low-temperature passivation and emitter formation on wafers bonded to glass

Govaerts, JonathanJonathanGovaertsGranata, StefanoStefanoGranataBearda, TwanTwanBeardaDross, FredericFredericDrossBoulord, CarolineCarolineBoulordBeaucarne, GuyGuyBeaucarneKorsos, FerencFerencKorsosBaert, KrisKrisBaertGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-212021-10-212013-060927-0248https://imec-publications.be/handle/20.500.12860/22421Development of a-Si/c-Si heterojunctions for the i2-module concept: low-temperature passivation and emitter formation on wafers bonded to glassJournal articlehttp://www.sciencedirect.com/science/article/pii/S0927024813000445