Veloso, AnabelaAnabelaVelosoCollaert, NadineNadineCollaertDe Keersgieter, AnAnDe KeersgieterWitters, LiesbethLiesbethWittersRooyackers, RitaRitaRooyackersVan Dal, MarkMarkVan DalDuffy, RayRayDuffyPawlak, BartekBartekPawlakLander, RobRobLanderHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16453Advanced FinFET devices for sub-32nm technology nodes: characteristics and integration challengesProceedings paper