High quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodes

Johnson, JoJoJohnsonLisoni, JuditJuditLisoniEveraert, Jean-LucJean-LucEveraertWouters, DirkDirkWouters2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6446High quality SBT ferroelectric capacitor fabrication using Iridium bottom electrodesOral presentation