Self-aligned 8nm T2T as cell boundary in the middle-of-line

Marien, PhilippePhilippeMarienHermans, YannickYannickHermansChoudhury, SubhobrotoSubhobrotoChoudhuryKundu, ShreyaShreyaKunduDecoster, StefanStefanDecosterUlu Okudur, FulyaFulyaUlu OkudurReddy, NaveenNaveenReddyKenens, BartBartKenensJourdan, NicolasNicolasJourdanDelie, GillesGillesDelieMarti, GiulioGiulioMartiWu, C.C.WuVega Gonzalez, VictorVictorVega GonzalezMurdoch, GayleGayleMurdochPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2025-03-062025-03-062024979-8-3503-8518-22380-632XWOS:001411360600028https://imec-publications.be/handle/20.500.12860/45339Self-aligned 8nm T2T as cell boundary in the middle-of-lineProceedings paper10.1109/IITC61274.2024.10732381979-8-3503-8517-5WOS:001411360600028