De Simone, DaniloDaniloDe SimoneRutigliani, VitoVitoRutiglianiLorusso, GianGianLorussoDe Bisschop, PeterPeterDe BisschopVesters, YannickYannickVestersBlanco, VictorVictorBlancoVandenberghe, GeertGeertVandenberghe2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30553EUV photoresist patterning characterization for imec N7/N5 technologyProceedings paperhttps://doi.org/10.1117/12.2299504