Meuris, MarcMarcMeurisArnauts, SophiaSophiaArnautsCornelissen, IngridIngridCornelissenKenis, KarineKarineKenisLux, MarcelMarcelLuxDe Gendt, StefanStefanDe GendtMertens, PaulPaulMertensTeerlinck, IvoIvoTeerlinckVos, RitaRitaVosLoewenstein, LeeLeeLoewensteinHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4584The IMEC Clean: implementation in advanced CMOS manufacturingJournal article