Scaling CMOS: finding the optimal gate dielectric

Kauerauf, ThomasThomasKaueraufGovoreanu, BogdanBogdanGovoreanuDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroeseneken2021-10-152021-10-152004-03https://imec-publications.be/handle/20.500.12860/9113Scaling CMOS: finding the optimal gate dielectricProceedings paper