Understanding of the endurance failure in scaled HfO2-based 1T1R RRAM through vacancy mobility degradation

Chen, YangyinYangyinChenDegraeve, RobinRobinDegraeveClima, SergiuSergiuClimaGovoreanu, BogdanBogdanGovoreanuGoux, LudovicLudovicGouxFantini, AndreaAndreaFantiniKar, Gouri SankarGouri SankarKarPourtois, GeoffreyGeoffreyPourtoisGroeseneken, GuidoGuidoGroesenekenWouters, DirkDirkWoutersJurczak, GosiaGosiaJurczak2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20443Understanding of the endurance failure in scaled HfO2-based 1T1R RRAM through vacancy mobility degradationProceedings paper