Rodrigues, MicheleMicheleRodriguesMartino, J.A.J.A.MartinoCollaert, NadineNadineCollaertSimoen, EddyEddySimoenClaeys, CorCorClaeys2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17889Channel backscattering coefficient impact on FinFET devices with uniaxial/biaxial strain engineeringProceedings paper