Fabrication of MOS-integrated metallic single electron memories

Pepin, A.A.PepinVieu, C.C.VieuLaunois, H.H.LaunoisRosmeulen, MaartenMaartenRosmeulenVan Rossum, MarcMarcVan RossumMüller, H. O.H. O.MüllerWilliams, D.D.WilliamsMizuta, H.H.MizutaNakazako, K.K.Nakazako2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4651Fabrication of MOS-integrated metallic single electron memoriesJournal article