The influence of geometrical imperfections in micromachined cantilevers on the extracted Young's modulus using a simple model

Van Barel, GregGregVan BarelDe Ceuninck, WardWardDe CeuninckWitvrouw, AnnAnnWitvrouw2021-10-172021-10-1720080960-1317https://imec-publications.be/handle/20.500.12860/14596The influence of geometrical imperfections in micromachined cantilevers on the extracted Young's modulus using a simple modelJournal article