Vandervorst, WilfriedWilfriedVandervorstDe Witte, HildeHildeDe WitteConard, ThierryThierryConardJanssens, TomTomJanssensSchaekers, MarcMarcSchaekersBrijs, BertBertBrijsHoussa, MichelMichelHoussa2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4881Characterization of (ultra)thin dielectricaOral presentation