Formation and wet removal of organic and titanium-containing residues on patterned TiN/porous low-k structure

Le, Quoc ToanQuoc ToanLeKesters, ElsElsKestersHolsteyns, FrankFrankHolsteyns2021-10-252021-10-252018-112162-8769https://imec-publications.be/handle/20.500.12860/31137Formation and wet removal of organic and titanium-containing residues on patterned TiN/porous low-k structureJournal articlehttp://jss.ecsdl.org/content/7/11/P602.abstract