Characterisation of AlCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural properties

Besling, WimWimBeslingYoung, EdwardEdwardYoungConard, ThierryThierryConardZhao, ChaoChaoZhaoCarter, RichardRichardCarterVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymaxDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsMaes, JosJosMaesTuominen, MarkoMarkoTuominenHaukka, S.S.Haukka2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6008Characterisation of AlCVD Al2O3-ZrO2 nanolaminates, link between electrical and structural propertiesJournal article