Su, JialeJialeSuVullers, RuudRuudVullersGoedbloed, MartijnMartijnGoedbloedvan Andel, YvonneYvonnevan AndelPellens, RudyRudyPellensGui, Cheng-QunCheng-QunGuiLeonov, VladimirVladimirLeonovWang, ZiyangZiyangWang2021-10-172021-10-172008-11https://imec-publications.be/handle/20.500.12860/14524Process development on large-topography microstructures for thermoelectric energy harvesters.Proceedings paper