Sobolewska, E.K.E.K.SobolewskaPelloux-Prayer, J.J.Pelloux-PrayerBecker, H.H.BeckerLi, G.G.LiDavies, C.S.C.S.DaviesKruckel, ClemensClemensKruckelAvilés-Félix, L.L.Avilés-FélixOlivier, A.A.OlivierSousa, R.C.R.C.SousaPrejbeanu, I.L.I.L.PrejbeanuKirilyuk, A.I.A.I.KirilyukVan Thourhout, DriesDriesVan ThourhoutRasing, T.T.RasingMoradi, F.F.MoradiHeck, M.J.R.M.J.R.Heck2021-10-292021-10-292020https://imec-publications.be/handle/20.500.12860/35982Proceedings paperhttps://doi.org/10.1117/12.2567662