Automated voids detection for metal filled trenches with bottom CD of 10nm

Hosseini, MaryamMaryamHosseiniMartinez Alanis, Gerardo TadeoGerardo TadeoMartinez Alanisvan der Veen, MarleenMarleenvan der VeenJourdan, NicolasNicolasJourdanDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchi2022-09-262022-05-052022-09-2620212380-632XWOS:000784773200040https://imec-publications.be/handle/20.500.12860/39741Automated voids detection for metal filled trenches with bottom CD of 10nmProceedings paper10.1109/IITC51362.2021.9537485978-1-7281-7632-1WOS:000784773200040