Focused-ion-beam fabrication of slanted grating couplers in silicon-on-insulator waveguides

Schrauwen, JonathanJonathanSchrauwenVan Laere, FrederikFrederikVan LaereVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-06https://imec-publications.be/handle/20.500.12860/12868Focused-ion-beam fabrication of slanted grating couplers in silicon-on-insulator waveguidesJournal article