Scanning spreading resistance microscopy and spectroscopy for routine and quantitative 2D-carrier profiling

Eyben, PierrePierreEybenXu, MingweiMingweiXuDuhayon, NatasjaNatasjaDuhayonClarysse, TrudoTrudoClarysseCallewaert, SvenSvenCallewaertVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5288Scanning spreading resistance microscopy and spectroscopy for routine and quantitative 2D-carrier profilingProceedings paper